Product | Niobium Target (Nb Target) |
Part Number | TRM-NB017 |
Material | UNS R04210 |
Purity | 99.95% |
Density | 8.57 g/cm3 |
CAS Number | 7440-03-1 |
Order Information
Please include the following information with your inquires and orders:
1. Quantity
2. Dimensions
3. Purity, or R04210 Commercial Grade
Assay
Element | R04200 (Reactor Grade) | R04210 (Commercial Grade) |
---|---|---|
O | 0.015% max | 0.025% max |
C | 0.01% max | 0.01% max |
N | 0.01% max | 0.01% max |
H | 0.0015% max | 0.0015% max |
Zr | 0.02% max | 0.02% max |
Fe | 0.005% max | 0.01% max |
Si | 0.005% max | 0.005% max |
W | 0.03% max | 0.005% max |
Ni | 0.005% max | 0.0050% max |
Mo | 0.01% max | 0.02% max |
Hf | 0.02% max | 0.02% max |
Ti | 0.02% max | 0.02% max |
Ta | 0.1% max | 0.3% max |
Nb | Remainder | Remainder |
Typical Size Available (Please inquire for details)
Shape | Dimension | Tolerance |
---|---|---|
Round Sputtering Target | 0.6″ to 15″ diameter x 0.12″ to 1″ thickness | +/-0.010″ or on request |
Rectangular and Flat Sputtering Target | 0.04″ to 1.5″ thickness x up to 31″ width x 115″ Length | +/-0.010″ or on request |
Please refer to Niobium Sheet for regular products.
Specifications for the Niobium Sputtering Target
Item | Specifications |
---|---|
Purity | 99.9% or 99.95% |
Recrystallization | 95% min |
Grain size | 60 micron or ASTM 4 or better |
Surface finish | 16 Rms max. or Ra 0.4 (RMS64 or better) |
Flatness | 0.15% max |
Physical Properties for Niobium
Physical properties | Niobium (Atomic#41) |
---|---|
Phase | Solid |
Melting point | 2750 K (2477°C, 4491°F) |
Boiling point | 5017 K (4744°C, 8571°F) |
Heat of fusion | 30 kJ/mol |
Heat of vaporization | 689.9 kJ/mol |
Molar heat capacity | 24.60 J/(mol•K) |