
| Product | Niobium Target (Nb Target) |
| Part Number | TRM-NB017 |
| Material | UNS R04210 |
| Purity | 99.95% |
| Density | 8.57 g/cm3 |
| CAS Number | 7440-03-1 |
Order Information
Please include the following information with your inquires and orders:
1. Quantity
2. Dimensions
3. Purity, or R04210 Commercial Grade
Assay
| Element | R04200 (Reactor Grade) | R04210 (Commercial Grade) |
|---|---|---|
| O | 0.015% max | 0.025% max |
| C | 0.01% max | 0.01% max |
| N | 0.01% max | 0.01% max |
| H | 0.0015% max | 0.0015% max |
| Zr | 0.02% max | 0.02% max |
| Fe | 0.005% max | 0.01% max |
| Si | 0.005% max | 0.005% max |
| W | 0.03% max | 0.005% max |
| Ni | 0.005% max | 0.0050% max |
| Mo | 0.01% max | 0.02% max |
| Hf | 0.02% max | 0.02% max |
| Ti | 0.02% max | 0.02% max |
| Ta | 0.1% max | 0.3% max |
| Nb | Remainder | Remainder |
Typical Size Available (Please inquire for details)
| Shape | Dimension | Tolerance |
|---|---|---|
| Round Sputtering Target | 0.6″ to 15″ diameter x 0.12″ to 1″ thickness | +/-0.010″ or on request |
| Rectangular and Flat Sputtering Target | 0.04″ to 1.5″ thickness x up to 31″ width x 115″ Length | +/-0.010″ or on request |
Please refer to Niobium Sheet for regular products.
Specifications for the Niobium Sputtering Target
| Item | Specifications |
|---|---|
| Purity | 99.9% or 99.95% |
| Recrystallization | 95% min |
| Grain size | 60 micron or ASTM 4 or better |
| Surface finish | 16 Rms max. or Ra 0.4 (RMS64 or better) |
| Flatness | 0.15% max |
Physical Properties for Niobium
| Physical properties | Niobium (Atomic#41) |
|---|---|
| Phase | Solid |
| Melting point | 2750 K (2477°C, 4491°F) |
| Boiling point | 5017 K (4744°C, 8571°F) |
| Heat of fusion | 30 kJ/mol |
| Heat of vaporization | 689.9 kJ/mol |
| Molar heat capacity | 24.60 J/(mol•K) |